Active Vibration Control vs. Passive Vibration Control

In this three part series, Wes Wigglesworth, TMC's Product Manager discusses pneumatic isolators and Parallel-Type active vibration control.

TMC’s Electro-Damp is an excellent example of a parallel-type active vibration control system. While these systems are limited in terms of their active bandwidth for floor vibration control, parallel-type active systems like Electro-Damp are ideal for supporting the inspection platform and moving stage inside semiconductor tools, for example wafer metrology instruments that use an electron beam and a moving stage to position the wafer. Mitigating high frequency floor vibration while also canceling the payload deflection and residual motion after the stage moves is critical to improving and maximizing the throughput in semiconductor manufacturing.

Vibration Isolation Options for Optical Tops and Laboratory Benches

In this video, Jake explains the different vibration isolation options, such as our standard Gimbal Piston Air Isolator or our MaxDamp isolator, and typical applications for each.

CleanBench tables and CleanTop optical tops typically incorporate TMC’s Gimbal Piston® Air Isolators as a standard feature. The Gimbal Piston has consistently out-performed other air isolators in side-by-side testing. Learn what applications typically use Gimbal Piston and which might be better served by MaxDamp.

Webinar: Vibration Control for OEMs of Industrial Equipment

Mechanical vibration is an increasingly common limiting factor which affects machine performance in many ways. Vibration can negatively impact the output of machines and instruments used in industry and scientific applications. It can be generated by the machine itself or introduced through various external sources. This webinar will describe common sources of vibration and how TMC works with OEMs to design specific vibration control strategies to address their specific needs. 

Application examples will be provided from instruments such as semiconductor wafer inspection tools, gene sequencers, electron microscopes, diamond turning lathes, atom probe tomography instruments, interferometers and optical profilometers.

Stacked Vibration Isolation Systems Solve Toughest Problems

Dmitri Basov, the founder of the Basov Group, is a professor in the Department of Physics at Columbia University. His research focuses on electronic phenomena in quantum materials that he investigates using various nano-optical techniques developed in his laboratory.

Dmitri moved his lab from a very quiet and stable basement in San Diego to the twenty-second floor of a building in Manhattan. Unfortunately, the vibration level at the new location is much higher than at the previous location.

Click here to see how TMC solved his vibration problem and allowed him to continue his research.

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